To improve data storage, researchers are perfecting 3D NAND flash memory, which stacks cells to maximize space. Researchers ...

What is Reactive Ion Etching (RIE)? Reactive Ion Etching (RIE) is a dry etching technique widely used in the fabrication of micro- and nanodevices. It combines the chemical reactivity of reactive ...

In reactive ion etching (RIE), many species such as neutrals, radicals, ions, electrons, and photons impact the surface simultaneously and continuously. This chapter introduces mechanisms that are ...

At least that’s [Sam]’s plan, which his new reactive-ion etching setup aims to make possible. While his Z1 dual differential amplifier chip was a huge success, the photolithography process he ...

To store ever more data in electronic devices of the same size, the manufacturing processes for these devices need to be ...

The narrow, deep holes required for one type of flash memory are made twice as fast with the right recipe, which includes a ...

Reactive Ion Etch (RIE) is a physical etch process. A rich plasma has been made just above the wafer, and the ions are expedited toward the surface to generate a highly powerful anisotropic etch.

Abstract: In this paper we describe the effect of oxygen-reactive ion-beam etching of a polyimide film to enhance its adhesion to an overlying, subsequently deposited copper film. The adhesion ...

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