This platform gives TSMC the opportunity to take the next step forward in exploring multiple e-beam technology as a lithography option at 22 nanometer and ... process technology and the foundry’s ...

This low level of design abstraction has remained unchanged for 20 years. Physical design teams face growing design complexity that is not only driven by the addition of nanometer verification steps ...

In addition to the usual three directions of motion, we’re familiar with, with the cartesian bot design, these types of machines add an additional two rotation axes, one which can swing the ...

National Institute for Materials Advancement, Pittsburgh State University, Pittsburgh, Kansas 66762, United States ...